Ordered Silicon Microwire Arrays Grown from Substrates Patterned Using Imprint Lithography and Electrodeposition
By Audesirk, Heather A.; Warren, Emily L.; Ku, Jessie & Lewis, Nathan S.
Published in ACS Applied Materials \& Interfaces
NULL
2015
Abstract
Silicon microwires grown by the vapor-liquid-solid process have attracted a great deal of interest as potential light absorbers for solar energy conversion. However, the research-scale techniques that have been demonstrated to produce ordered arrays of micro and nanowires may not be optimal for use as high-throughput processes needed for large-scale manufacturing. Herein we demonstrate the use of microimprint lithography to fabricate patterned templates for the confinement of an electrodeposited Cu catalyst for the vapor-liquid-solid (VLS) growth of Si microwires. A reusable polydimethylsiloxane stamp was used to pattern holes in silica sol-gels on silicon substrates, and the Cu catalyst was electrodeposited into the holes. Ordered arrays of crystalline p-type Si microwires were grown across the sol-gel-patterned substrates with materials quality and performance comparable to microwires fabricated with high-purity metal catalysts and cleanroom processing.
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