Dense high-aspect ratio 3D carbon pillars on interdigitated microelectrode arrays
By Letizia Amato and Arto Heiskanen and Rasmus Hansen and Lauge Gammelgaard and Tomas Rindzevicius and Maria Tenje and Jenny Emn
Published in Carbon
NULL
2015
Abstract
In this work we present high-aspect ratio carbon pillars (1.4 ?m in diameter and ?11 ?m in height) on top of interdigitated electrode arrays to be used for electrochemical applications. For this purpose, different types of 2D and 3D pyrolysed carbon structures were fabricated and characterised including surface- and microstructure, electrical and electrochemical properties. A pre-treatment of oxidised Si wafers is introduced to eliminate electrode delamination and ensure structure stability in water during long time-experiments. Additionally, a heat treatment method is reported for regeneration of pyrolysed carbon films with increased film resistance due to oxidation during storage.
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