High-performance reverse electrowetting energy harvesting using atomic-layer-deposited dielectric film

By Yang, Hwichul; Hong, Soonwook; Koo, Bongjun; Lee, Dohaeng; Kim, Young-Beom
Published in Nano Energy NULL 2017

Abstract

Abstract Reverse electrowetting-on-dielectric (REWOD), which is a novel technology for energy harvesting, was demonstrated by depositing Al2O3 via atomic layer deposition (ALD). Specifically, thin layers of Al2O3 about 100 nm-thick were successfully formed by {ALD} to obtain dense films with high capacitances. {REWOD} with the {ALD} Al2O3 thin films exhibited high performances under low-voltage and low-excitation-frequency conditions. The maximum power density was 11 mW/cm2 with a {DC} bias of 24 V and an external excitation frequency of 2 Hz. Moreover, {ALD} and sputtered thin films were compared by investigating their capacitances and leakage current densities. Due to the differences between the film densities and growth methods, the {ALD} thin films exhibited higher capacitances and lower leakage current densities. It was also determined that the leakage current affects the {REWOD} energy harvesting performance. By analyzing these features, it was confirmed that {ALD} thin films are suitable for {REWOD} energy harvesting.

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