On the doping concentration dependence and dopant selectivity of photogenerated carrier assisted etching of 4H
By Pavunny, Shojan P.; Myers-Ward, Rachael L.; Daniels, Kevin M.; Shi, Wendy; Sridhara, Karthik; DeJarld, Matthew T.; Boyd, Anthony K.; Kub, Francis J.; Kohl, Paul A.; Carter, Samuel G.; Gaskill, D. Kurt
Published in Electrochimica Acta
2019
Abstract
A comprehensive photogenerated carrier assisted etching investigation is carried out on the Si polar surface of high-quality p- and n-type (0001) 4H
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